The attempt to take IC lithography to the 157nm wavelength is forcing manufacturers to seek alternatives to a lens material that could send the price of steppers soaring even higher than today.

Nikon will try to claw back lithography customers by selling argon fluoride (ArF) tools for less than the market leader, ASML.

Scientists working at the National Institute of Standards and Technology (NIST) have demonstrated a new type of lens that bends and focuses ultraviolet (UV) light in such an unusual way that it can ...

SANTA CLARA, Calif. — In a move to keep up with growing demand for its lithography-lens materials, Corning Inc. is aggressively ramping up production of these products in its new plant in Canton, N.Y.

New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on ...

Canon Inc. announced today the release of the FPA-3030i6 i-line[i] stepper, a new semiconductor lithography system for processing wafers with a diameter of 8 inches (200 mm) or smaller. The FPA-3030i6 ...

Nikon will try to claw back lithography customers by selling argon fluoride (ArF) tools for less than the market leader, ASML ...

Exposure toolmaker Nikon said that it has shipped a production version of its immersion lithography scanner, the NSR-S609B. The tool shipped last month, and the Japanese supplier claimed it is the ...

Designers of semiconductor lithography equipment have made some impressive strides over the last few years. But soon, they're going to be victims of their own success. Scientists at the National ...

Lithographers have always faced tradeoffs between speed and flexibility. Steppers are very good at printing hundreds or thousands of identical features onto hundreds or thousands of wafers. They are ...

Fig. 1 | Metalens-based DLW lithography. Schematic diagrams of (a) the DLW lithography setup, (b) the metalens and its constructing unit cells. (c) The metalens in top view and cross-section view. (d) ...